Uses Electron microprobe

1 uses

1.1 materials science , engineering
1.2 mineralogy , petrology
1.3 palaeontology
1.4 meteorite analysis

uses
materials science , engineering

a section of 1886ve10 microcontroller die seen electron microprobe. small bright cylinders tungsten vias left on metalization etching process. x-ray spectroscopy technique can used determine material composition of vias.



for comparison purposes, similar section of 1886ve10 microcontroller die seen optical microscope.

the technique commonly used analyzing chemical composition of metals, alloys, ceramics, , glasses. particularly useful assessing composition of individual particles or grains , chemical changes on scale of few micrometres millimeters. electron microprobe used research, quality control, , failure analysis.

mineralogy , petrology

this technique commonly used mineralogists , petrologists. rocks aggregates of small mineral grains. these grains may preserve chemical information adopted during formation , subsequent alteration. information may illuminate geologic processes, such crystallization, lithification, volcanism, metamorphism, orogenic events (mountain building), plate tectonics. technique used study of extraterrestrial rocks (i.e. meteorites), , provides chemical data vital understanding evolution of planets, asteroids, , comets.

the change in elemental composition center (also known core) edge (or rim) of mineral can yield information history of crystal s formation, including temperature, pressure, , chemistry of surrounding medium. quartz crystals, example, incorporate small, measurable amount of titanium structure function of temperature, pressure, , amount of titanium available in environment. changes in these parameters recorded titanium crystal grows.

palaeontology

in exceptionally preserved fossils, such of burgess shale, soft parts of organisms may preserved. since these fossils compressed 2d film, can difficult deduce features what: famous example of triangular extensions in opabinia, interpreted either legs or extensions of gut. elemental mapping showed had similar composition gut, favouring second interpretation. because of thin nature of carbon films, low voltages (5-15 kv) can used in such specimens.

for more information element abundance in burgess shale, see burgess shale type preservation#elemental mapping

meteorite analysis

the chemical composition of meteorites can analysed quite accurately using epma technique. can reveal lot of information conditions existed in our solar system many years ago.