Materials science and engineering Electron microprobe

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a section of 1886ve10 microcontroller die seen electron microprobe. small bright cylinders tungsten vias left on metalization etching process. x-ray spectroscopy technique can used determine material composition of vias.



for comparison purposes, similar section of 1886ve10 microcontroller die seen optical microscope.


the technique commonly used analyzing chemical composition of metals, alloys, ceramics, , glasses. particularly useful assessing composition of individual particles or grains , chemical changes on scale of few micrometres millimeters. electron microprobe used research, quality control, , failure analysis.







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